Active solid-state devices (e.g. – transistors – solid-state diode – Responsive to non-electrical signal – Physical deformation
Patent
1996-04-19
1997-08-19
Crane, Sara W.
Active solid-state devices (e.g., transistors, solid-state diode
Responsive to non-electrical signal
Physical deformation
257417, 257419, H01L 2982
Patent
active
056591969
ABSTRACT:
An integrated circuit device for acceleration detection (100) includes a thick substrate (1) and a semiconductor strain sensor (2) provided on the thick substrate (1) with conductive solder bump electrodes (8) interposed therebetween. The semiconductor strain sensor (2) has a mass holding part (2b), an acceleration sensing part (2a) provided with a piezoresistance layer, a base end part (2c) fixed on the solder bump electrode (8) and a balance keeping part (2d). Electric signals obtained from the semiconductor strain sensor (2) are connected to pattern wiring lines (7) which are provided on the thick substrate (1) by means of the solder bump electrode (8) interposed therebetween. A space (W) between the thick substrate (1) and the mass holding part (2b) depends upon the solder bump electrode (8). When an acceleration is applied to the integrated circuit device for acceleration detection (100) having the above constitution, the acceleration sensing part (2a) and a mass holding part (2b), and the balance keeping part (2d) vibrate unbalancedly in the respective natural vibration modes which are different from one another above the solder bump electrode (8), affecting one another. Thus, the integrated circuit device for acceleration detection (100) which achieves high yield and quality is provided.
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Cao Phat X.
Crane Sara W.
Mitsubishi Denki & Kabushiki Kaisha
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