Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Making electrical device
Patent
1996-10-28
1998-06-30
Baxter, Janet C.
Radiation imagery chemistry: process, composition, or product th
Imaging affecting physical property of radiation sensitive...
Making electrical device
430317, 430318, 4302721, 430320, 430330, G03C 500
Patent
active
057731977
ABSTRACT:
The invention relates to an integrated circuit device comprising (i) a substrate; (ii) metallic circuit lines positioned on the substrate and (iii) a dielectric material positioned on the circuit lines. The dielectric material comprises the reaction product of an organic polysilica and uncondensed precursor polymer preferably terminated with an alkoxysilyl alkyl group.
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Carter Kenneth Raymond
Hedrick James Lupton
Miller Robert Dennis
Ashton Rosemary
Baxter Janet C.
International Business Machines - Corporation
Martin Robert B.
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