Semiconductor device manufacturing: process – Formation of electrically isolated lateral semiconductive... – Total dielectric isolation
Reexamination Certificate
2005-08-23
2005-08-23
Pham, Hoai (Department: 2814)
Semiconductor device manufacturing: process
Formation of electrically isolated lateral semiconductive...
Total dielectric isolation
C438S779000, C438S957000
Reexamination Certificate
active
06933205
ABSTRACT:
The present invention provides an integrated circuit, comprising a semiconductor substrate, an active element formed on the side of one main surface of the semiconductor substrate, an insulating region formed on the side of the main surface of the semiconductor substrate by burying an insulating material in a groove having a depth of at least 20 μm, and a passive element formed directly or indirectly on the insulating region. It is desirable for the passive element to be an inductor.
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Hayasaka Nobuo
Matsunaga Noriaki
Matsuo Mie
Okumura Katsuya
Finnegan Henderson Farabow Garrett & Dunner L.L.P.
Kabushiki Kaisha Toshiba
Peralta Ginette
Pham Hoai
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