Integrated circuit contacts with secured stringers

Active solid-state devices (e.g. – transistors – solid-state diode – Combined with electrical contact or lead – Of specified configuration

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Details

257690, 257773, 257775, H01L 2348, H01L 2352, H01L 2940

Patent

active

055833802

ABSTRACT:
A contact of large dimensions having a stringer strongly adhered to a contact hole's sidewalls. The contact hole is made to have a patterned perimeter having grooves protruding outward. The grooves have a size equal to a minimum contact dimension in at least one direction so as to ensure good step coverage into the groove areas. The grooves serve to anchor the stringer to the contact hole sidewalls by increasing the sidewall's surface area which increases adhesion, distributing stress from the stringer to the groove areas, and providing grooves with good step coverage.

REFERENCES:
patent: 5480820 (1996-01-01), Roth et al.

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