Integrated circuit capacitor including anchored plug

Details Integrated circuit capacitor including anchored plug Integrated circuit capacitor including anchored plug

1999-07-30

2000-11-28

Meier, Stephen D.

Active solid-state devices (e.g., transistors, solid-state diode

Field effect device

Having insulated electrode

257304, H01L 27108, H01L 2976, H01L 2994, H01L 31119

Patent

active

061539015

ABSTRACT:
An integrated circuit capacitor includes a substrate with an interconnection line adjacent the substrate, and a first dielectric layer on the interconnection line. The first dielectric layer includes a trench therein. The metal plug includes a body portion extending upwardly into the trench, and an anchor portion is connected to the body portion and extends into the interconnection line. The anchor portion has an enlarged width portion to anchor the metal plug adjacent lower portions of the first dielectric layer. Because the metal plug is anchored, a depth of the trench can be greater without the metal plug becoming loose and separating from the underlying interconnection line.

REFERENCES:
patent: 5336912 (1994-08-01), Ohtsuki
patent: 5563762 (1996-10-01), Leung et al.
patent: 5619071 (1997-04-01), Myers et al.
patent: 5903493 (1999-05-01), Lee

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