Integrated circuit and process for its manufacture

Details Integrated circuit and process for its manufacture Integrated circuit and process for its manufacture

1996-10-28

1998-06-16

Niebling, John

Semiconductor device manufacturing: process

Coating with electrically or thermally conductive material

To form ohmic contact to semiconductive material

438633, 438781, 438790, H01L 2128

Patent

active

057670145

ABSTRACT:
The invention relates to an integrated circuit device comprising (i) a substrate; (ii) metallic circuit lines positioned on the substrate and (iii) a dielectric material positioned on the circuit lines. The dielectric material comprises the reaction product of a hyperbranched polymer and organic polysilica.

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