Active solid-state devices (e.g. – transistors – solid-state diode – Responsive to non-electrical signal – Physical deformation
Reexamination Certificate
2011-06-07
2011-06-07
Garber, Charles (Department: 2812)
Active solid-state devices (e.g., transistors, solid-state diode
Responsive to non-electrical signal
Physical deformation
C257S414000, C438S050000, C438S052000, C438S053000
Reexamination Certificate
active
07956429
ABSTRACT:
The present invention relates to using an insulator layer between two metal layers of a semiconductor die to provide a micro-electromechanicalsystems (MEMS) device, such as an ohmic MEMS switch or a capacitive MEMS switch. In an ohmic MEMS switch, the insulator layer may be used to reduce metal undercutting during fabrication, to prevent electrical shorting of a MEMS actuator to a MEMS cantilever, or both. In a capacitive MEMS switch, the insulator layer may be used as a capacitive dielectric between capacitive plates, which are provided by the two metal layers. A fixed capacitive element may be provided by the insulator layer between the two metal layers. In one embodiment of the present invention, an ohmic MEMS switch, a capacitive MEMS switch, a fixed capacitive element, or any combination thereof may be integrated into a single semiconductor die.
REFERENCES:
patent: 6054659 (2000-04-01), Lee et al.
patent: 6396368 (2002-05-01), Chow et al.
patent: 6635919 (2003-10-01), Melendez et al.
patent: 7471176 (2008-12-01), Bunyan et al.
patent: 7709285 (2010-05-01), Van Beek et al.
patent: 2004/0214543 (2004-10-01), Osone et al.
patent: 2006/0208823 (2006-09-01), Hunt et al.
patent: 2006/0226735 (2006-10-01), Ikehashi
patent: 2006/0270238 (2006-11-01), Izumi et al.
patent: 2008/0090320 (2008-04-01), Heck
Costa Julio
Ivanov Tony
Kim Sang-chae
Garber Charles
Junge Bryan R
RF Micro Devices, Inc.
Withrow & Terranova, P.L.L.C.
LandOfFree
Insulator layer based MEMS devices does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Insulator layer based MEMS devices, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Insulator layer based MEMS devices will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-2677986