Active solid-state devices (e.g. – transistors – solid-state diode – With means to control surface effects – Insulating coating
Reexamination Certificate
2008-04-01
2008-04-01
Pert, Evan (Department: 2826)
Active solid-state devices (e.g., transistors, solid-state diode
With means to control surface effects
Insulating coating
C257S640000, C257S751000, C257S774000, C257SE21260, C257SE21277, C257SE21279
Reexamination Certificate
active
07352053
ABSTRACT:
A method of manufacturing a mechanically robust insulating layer, including forming a low-k dielectric layer having a first dielectric constant on a substrate and forming a carbon nitride cap layer on the low-k dielectric layer, the insulating layer thereby having a second dielectric constant that is less than the first dielectric constant.
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Erdem Fazli
Haynes & Boone LLP
Pert Evan
Taiwan Semiconductor Manufacturing Company , Ltd.
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