Coating processes – Coating by vapor – gas – or smoke – Carbon or carbide coating
Reexamination Certificate
2006-02-06
2008-08-19
Moore, Margaret G (Department: 1796)
Coating processes
Coating by vapor, gas, or smoke
Carbon or carbide coating
C428S447000, C556S482000, C556S453000, C556S457000
Reexamination Certificate
active
07413775
ABSTRACT:
An insulating film material formed by chemical vapor deposition, which contains an organic silane compound having such a structure that at least one secondary hydrocarbon group and/or tertiary hydrocarbon group is directly bonded to a silicon atom.
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Hara Daiji
Yoshida Keisuke
Moore Margaret G
Sughrue & Mion, PLLC
Tosoh Corporation
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