Coating apparatus – Gas or vapor deposition – Multizone chamber
Reexamination Certificate
2005-08-02
2005-08-02
Bueker, Richard (Department: 1763)
Coating apparatus
Gas or vapor deposition
Multizone chamber
C118S7230EB, C118S726000, C118S730000
Reexamination Certificate
active
06923868
ABSTRACT:
This invention relates to an apparatus for electron-ray deposition of a coating on an article. The apparatus comprises a processing chamber with crucibles and electron gun located in the processing chamber and a pre-chamber for loading/unloading cartridges with articles to be coated. The cartridges have a lower fixed conic pinion on a vertical support and are located on a lower cover of a processing chamber. A shaft rotates inside the cartridges which engages an upper running conic pinion of the cartridges.
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Grechanyuk Mikola
Kucherenko Pavlo
Bueker Richard
GBA S.A.
Greenberg & Traurig, LLP
Rzucidlo Eugene C.
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