Pressure sensor having diaphragm

Details Pressure sensor having diaphragm Pressure sensor having diaphragm

2005-08-23

2005-08-23

Patel, Harshad (Department: 2855)

Measuring and testing

Fluid pressure gauge

Electrical

C073S754000

Reexamination Certificate

active

06931937

ABSTRACT:
A pressure sensor includes: a casing; a sensor chip with a gauge resistor; a boss disposed on the gauge resistor; a metallic diaphragm capable of distorting in accordance with a pressure; and a load transmission member disposed between the metallic diaphragm and the boss. The casing accommodates the sensor chip, the boss and the load transmission member. The casing is covered with the metallic diaphragm. The pressure applied to the diaphragm is detected such that the load corresponding to the pressure is applied to the gauge resistor through the metallic diaphragm, the load transmission member and the boss so that the pressure is measured on the basis of a resistance change of the gauge resistor. The gauge resistor is larger than the boss.

REFERENCES:
patent: 5349873 (1994-09-01), Omura et al.
patent: 5507186 (1996-04-01), Weiblen et al.

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