Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Reexamination Certificate
2007-06-01
2008-08-12
Berman, Jack I (Department: 2881)
Radiant energy
Inspection of solids or liquids by charged particles
Electron probe type
C250S307000
Reexamination Certificate
active
07411191
ABSTRACT:
An inspection apparatus by an electron beam comprises: an electron-optical device70having an electron-optical system for irradiating the object with a primary electron beam from an electron beam source, and a detector for detecting the secondary electron image projected by the electron-optical system; a stage system50for holding and moving the object relative to the electron-optical system; a mini-environment chamber20for supplying a clean gas to the object to prevent dust from contacting to the object; a working chamber31for accommodating the stage device, the working chamber being controllable so as to have a vacuum atmosphere; at least two loading chambers41, 42disposed between the mini-environment chamber and the working chamber, adapted to be independently controllable so as to have a vacuum atmosphere; and a loader60for transferring the object to the stage system through the loading chambers.
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Hatakeyama Masahiro
Karimata Tsutomu
Kimba Toshifumi
Murakami Takeshi
Nagahama Ichirota
Berman Jack I
Ebara Corporation
Kabushiki Kaisha Toshiba
Westerman, Hattori, Daniels & Adrian , LLP.
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