Radiation imagery chemistry: process – composition – or product th – Including control feature responsive to a test or measurement
Patent
1996-12-04
1998-03-03
Lesmes, George F.
Radiation imagery chemistry: process, composition, or product th
Including control feature responsive to a test or measurement
430323, 430394, 430329, 216 59, 216 84, 356390, G03C 500
Patent
active
057232385
ABSTRACT:
A method of inspecting a lens includes projecting a first amount of radiation through a first test pattern and the lens to provide a first lens error associated with a first heating of the lens, projecting a second amount of radiation through a second test pattern and the lens to provide a second lens error associated with a second heating of the lens, and using the first and second lens errors to provide image displacement data that varies as a function of heating the lens. In this manner, corrections can be made for localized lens heating that is unique to a given reticle. The method is well-suited for photolithographic systems such as step and repeat systems.
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Dawson Robert
Fulford Jr. H. Jim
Gardner Mark I.
Hause Frederick N.
Michael Mark W.
Advanced Micro Devices , Inc.
Lesmes George F.
Sigmond David M.
Weiner Laura
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