Optical: systems and elements – Lens – Microscope objective
Reexamination Certificate
2006-03-28
2006-03-28
Nguyen, Thong (Department: 2872)
Optical: systems and elements
Lens
Microscope objective
C359S355000, C359S368000
Reexamination Certificate
active
07019910
ABSTRACT:
An inspection microscope (1) having a light source (3) that emits light of a first wavelength below 400 nm for illumination of a specimen (13) to be inspected, and having an objective (11) that is composed of multiple optical components and has a numerical aperture and a focal length, and having a tube optical system (21) and an autofocus device (25) that directs light of a second wavelength onto the specimen (13), is disclosed. The inspection microscope (1) is characterized by the objective (11), which has an optical correction that eliminates the longitudinal chromatic aberrations with respect to the first and the second wavelength and whose optical components are assembled in cement-free fashion, the second wavelength being greater than 400 nm.
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English Translation of EP1067420A2.
Peter A. Heimann et al., “Deep Ultraviolet Microscope”, Applied Optics, vol. 29, No. 4, XP000094489, Feb. 1, 1990, pp. 495-501.
Lavarias Arnel C.
Leica Microsystems Semiconductor GmbH
Nguyen Thong
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