Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Reexamination Certificate
2006-04-28
2008-12-09
Berman, Jack I (Department: 2881)
Radiant energy
Inspection of solids or liquids by charged particles
Electron probe type
C250S306000, C250S307000, C250S491100, C250S397000, C250S3960ML
Reexamination Certificate
active
07462828
ABSTRACT:
In an electric immersion lens having high resolution capability, secondary electrons generated from a specimen are accelerated to suppress the dependency of rotational action of the secondary electrons applied thereto by an objective lens upon energy levels of the secondary electrons and when selectively detecting low and high angle components of elevation and azimuth as viewed from a secondary electron generation site by means of an annular detector interposed between an electron source and the objective lens, the secondary electrons are adjusted and deflected by means of an E×B deflector such that the center axis of secondary electrons converged finely under acceleration is made to be coincident with the center axis of a low elevation signal detection system and the secondary electrons are deviated from an aperture of a high elevation signal detection system.
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Fukada Atsuko
Fukuda Muneyuki
Nishiyama Hidetoshi
Sato Mitsugu
Suzuki Naomasa
Berman Jack I
Hitachi High-Technologies Corporation
Logie Michael J
McDermott Will & Emery LLP
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