Electricity: measuring and testing – Fault detecting in electric circuits and of electric components – Of individual circuit component or element
Reexamination Certificate
2007-08-28
2007-08-28
Nguyen, Ha Tran (Department: 2829)
Electricity: measuring and testing
Fault detecting in electric circuits and of electric components
Of individual circuit component or element
Reexamination Certificate
active
11296482
ABSTRACT:
At least one pair of electrode formed on a mounting surface of a stage is in contact with a conductive layer formed on a first surface of an inspection object, and an electrical path is formed between the both by using a fritting phenomenon.
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Kataoka et al. “Low Contact-Force and Compliant Mems Probe Card Utilizing Fritting Contact,”Proceedings of the IEEE 15thAnnual International Conference on Microelectro Mechanical Systems(MEMS) (2002);IEEE International Micro Electro Mechanical Systems Conference, New York, NY: IEEE, vol. Conf. 15, pp. 364-367, (2002).
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Itoh Toshihiro
Kataoka Kenichi
Komatsu Shigekazu
Suga Tadatomo
Nguyen Ha Tran
Tokyo Electron Limited
Velez Roberto
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