Optics: measuring and testing – Inspection of flaws or impurities – Surface condition
Reexamination Certificate
2008-01-01
2008-01-01
Stafira, Michael P. (Department: 2877)
Optics: measuring and testing
Inspection of flaws or impurities
Surface condition
C356S237400
Reexamination Certificate
active
10722531
ABSTRACT:
The present invention provides an inspection apparatus and inspection method. The inspection apparatus provided by the present invention comprises an illumination optical system which illuminates light to an object under inspection; a detection optical system which detects light reflected from said object and converts the detected light into an image signal; a spatial filter which is provided in said detection optical system to selectively shield diffracted light pattern coming from a circuit pattern existing on the object by combining light-shielding points of minute dots state; an arithmetic processing system which processes the image signal detected by said detection optical system; and a monitor which observes foreign matters/defects based on a signal processed by said arithmetic processing system.
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Japanese Office Action dated Mar. 27, 2007.
Hamamatsu Akira
Jingu Takahiro
Nishiyama Hidetoshi
Noguchi Minori
Ohshima Yoshimasa
Hitachi High-Technologies Corporation
Stafira Michael P.
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