Inspection method and apparatus using scanning laser SQUID...

Details Inspection method and apparatus using scanning laser SQUID... Inspection method and apparatus using scanning laser SQUID...

2007-07-31

2007-07-31

LeDynh, Bot (Department: 2862)

Electricity: measuring and testing

Magnetic

Magnetometers

C324S501000, C505S846000

Reexamination Certificate

active

11374160

ABSTRACT:
A non-destructive method of narrowing down the location of a failure in a sample includes a first step of acquiring first and second images of magnetic-field distributions obtained by scanning a laser beam irradiating first and second samples, respectively, and if there is a difference between the first and second images of the magnetic-field distributions, a second step of acquiring first and second current images from magnetic-field distributions acquired by scanning the first and second samples by a magnetic-field detector in a state in which a prescribed location on the first and second samples is being irradiated by the laser beam. The difference between the first and second current images is found and, based upon the difference image found, it becomes possible to identify a disparity in current paths relating to the prescribed location on the first and second samples.

REFERENCES:
patent: 2002-313859 (2002-10-01), None
patent: 2004-93211 (2004-03-01), None

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