Optics: measuring and testing – By configuration comparison – With projection on viewing screen
Reexamination Certificate
2008-10-27
2010-06-15
Nguyen, Sang (Department: 2886)
Optics: measuring and testing
By configuration comparison
With projection on viewing screen
C356S394000, C356S237300, C356S601000
Reexamination Certificate
active
07738103
ABSTRACT:
In a method for determining a structure parameter of a target pattern, a first series of calibration spectra are determined from at least one reference pattern, each spectra being determined using a different known value of at least one structure parameter of the respective reference pattern. The first series of calibration spectra does not take into account parameters of an apparatus used to produce the reference pattern. A representation of each of the first series calibration spectra is stored in a central library. A second series of calibration spectra corresponding to at least one of the stored spectra for a target spectrum is determined using the parameters of the apparatus for measuring the target spectrum. A measured target spectrum is produced by directing a beam of radiation onto the target pattern. The measured target spectrum and the second series of calibration spectra are compared, where this comparison is used to derive a value for the structure parameter of the target pattern.
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Cramer Hugo Augustinus Joseph
Den Boef Arie Jeffrey
Kiers Antione Gaston Marie
ASML Netherlands B.V.
Nguyen Sang
Sterne Kessler Goldstein & Fox P.L.L.C.
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