Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Reexamination Certificate
2011-05-03
2011-05-03
Johnston, Phillip A (Department: 2881)
Radiant energy
Inspection of solids or liquids by charged particles
Electron probe type
C250S492100, C250S492200
Reexamination Certificate
active
07935926
ABSTRACT:
Inspection equipment using a microcolumn is disclosed. The inspection equipment of the present invention can conduct inspection of a fine circuit, which could not be conducted using conventional optical inspection equipment. Furthermore, the present invention can rapidly inspect a display, having a relatively large area, and can have a precise inspection function and a repair function. The inspection equipment of the present invention includes a plurality of microcolumns, a shaft, to which the microcolumns are coupled, and which is disposed in a direction perpendicular to a direction in which an object is moved, and a detector for detecting electron beams radiated from the microcolumns onto the object to determine whether errors exist in a circuit of the object.
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Johnston Phillip A
Park John K.
Park Law Firm
LandOfFree
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