Inspection apparatus of electronic component

Details Inspection apparatus of electronic component Inspection apparatus of electronic component

1997-04-17

1999-01-26

Kim, Robert

Optics: measuring and testing

By configuration comparison

With two images of single article compared

356392, G01B 1100, G01B 908

Patent

active

058644059

ABSTRACT:
Terminal groups (2a), (2b), (2c) and (2d) extending in respective directions, of an IC (1 ) disposed on a stage (11 ) are reflected by first mirrors (31a), (31b), (31c) and (31d) down toward second mirrors (32a), (32b), (32c) and (32d). The terminal groups are reflected by the second mirrors toward the center and are further reflected by third mirrors (33a), (33b), (33c) and (33d) downward. The reflected terminal groups are received by a lens unit (35 ) and image taking means to be displayed in a display screen so that front images of the terminal groups of the IC (1 ) in the respective directions as viewed from the sides thereof can be displayed in the same display screen. Accordingly, the terminal groups in the respective directions can be inspected at one time.

REFERENCES:
patent: 4585351 (1986-04-01), Gronek et al.
patent: 5131753 (1992-07-01), Pine et al.
patent: 5278632 (1994-01-01), Shotwell
patent: 5452080 (1995-09-01), Tomiya
patent: 5563703 (1996-10-01), Lebeau et al.
patent: 5621530 (1997-04-01), Marrable, Jr.

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