Inspection apparatus incorporating digital electron detection

Details Inspection apparatus incorporating digital electron detection Inspection apparatus incorporating digital electron detection

1988-11-29

1991-01-15

Berman, Jack I.

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

250306, 250311, 25049222, G01N 2300

Patent

active

049856286

ABSTRACT:
An inspection apparatus which incorporates a digital electron detection device. In this apparatus, counting devices are used for the measurement of electrons emanating from an object after interaction with an incident radiation beam. Using these counters, detection is also possible even when the electron pulses have a small current content. By the addition of a DAC and possibly a sample-and-hold circuit, spectometric measurements are possible so that absolute potential values of a measuring point can be determined. For measurement of comparatively large currents, digital feedback can be used. Multi-sampling make possible much faster measurements.

REFERENCES:
patent: 4199688 (1980-04-01), Ozasa
patent: 4301366 (1981-11-01), Bertin et al.
patent: 4309606 (1982-01-01), Bjorkman et al.
patent: 4322626 (1982-03-01), Kawashima
patent: 4788426 (1988-11-01), Kuehnle
patent: 4804840 (1989-02-01), Ichihashi
patent: 4818873 (1989-04-01), Herriot
patent: 4831328 (1989-05-01), Brust
patent: 4870344 (1989-09-01), Stille

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