Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Patent
1998-07-16
2000-10-31
Ham, Seungsook
Radiant energy
Inspection of solids or liquids by charged particles
Electron probe type
250307, 250397, G01N 2300, H01J 326
Patent
active
061406449
ABSTRACT:
The inspection apparatus uses a particle beam and has a high throughput by obtaining a characteristic frequency corresponding to the characteristic quantity of focusing-shift from a Fourier spectrum of a sample image using a focusing-shift evaluator. A beam blur profile is produced corresponding to the characteristic frequency in a beam blur profile generator. A component of the beam-blur profile is removed from the sample image stored in one dimensional image memory using a de-convolution operator. A dimensional measurement is performed in a critical dimension evaluator for an obtained sample image. Since time spent for focus adjustment using particle beam scanning is obviated, it is possible to reduce the inspection time for a dimension and an appearance abnormality of a semiconductor element.
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Kawanami Yoshimi
Otaka Tadashi
Yoneyama Akio
Ham Seungsook
Hitachi , Ltd.
Patti John
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