Optics: measuring and testing – Of light reflection
Reexamination Certificate
2011-06-28
2011-06-28
Chowdhury, Tarifur R. (Department: 2886)
Optics: measuring and testing
Of light reflection
Reexamination Certificate
active
07969577
ABSTRACT:
When using a scatterometer different portions of a target area may be at different focal depths. When the whole area is measured this results in part of it being out of focus. To compensate for this an array of lenses is placed in the back focal plane of the high numerical aperture lens.
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Mos Everhardus Cornelis
Van Der Schaar Maurits
Werkman Roy
Akanbi Isiaka O
ASML Netherlands B.V.
Chowdhury Tarifur R.
Sterne Kessler Goldstein & Fox P.L.L.C.
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