Inspecting method, inspecting system, and method for...

Image analysis – Applications – Manufacturing or product inspection

Reexamination Certificate

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C356S237400

Reexamination Certificate

active

07068834

ABSTRACT:
The present invention has an analyzing unit including an image detection device for producing a plurality of images of a workpiece, a storage for storing detected images produced by the image detection device, and a display having a screen with a first area for displaying a plurality of detected images stored in the storage and a plurality of second areas for classifying the detected images according to features of the detected images, whereby the plurality of detected images are moved on the screen from the first area to selected second areas to classify the plurality of detected images in the second areas.

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“Semiconductor World”, 1996.8, pp. 88, 99 and 102.

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