Conveyors: fluid current – Having means for maintaining load in suspension along flow path – By load supporting jets
Reexamination Certificate
2004-06-07
2008-07-01
Hess, Douglas A (Department: 3651)
Conveyors: fluid current
Having means for maintaining load in suspension along flow path
By load supporting jets
C414S676000
Reexamination Certificate
active
07393159
ABSTRACT:
An inline transfer system and method are provided for the secure transport and efficient processing of substrates such as glass substrates or semiconductor devices. A rotary conveyor is provided that includes a plurality of air nozzles which inject air to move a substrate above the plurality of air nozzles without the plurality of air nozzles making contact with the substrate. At least two independent processing units are operably coupled to the rotary conveyor. Advantageously, because a plurality of substrates may be processed in parallel, greater efficiency and flexibility are provided. Because the substrate can be moved without physical contact between the structure of the air nozzles and the substrate, the transfer is secure, clean, and efficient.
REFERENCES:
patent: 3399042 (1968-08-01), McMaster et al.
patent: 3580640 (1971-05-01), Eriksson
patent: 3812947 (1974-05-01), Nygaard
patent: 3865254 (1975-02-01), Johannsmeier
patent: 3976330 (1976-08-01), Babinski et al.
patent: 4009785 (1977-03-01), Trayes
patent: 4014428 (1977-03-01), Ossbahr
patent: 4293249 (1981-10-01), Whelan
patent: 4348139 (1982-09-01), Hassan et al.
patent: 4378182 (1983-03-01), Futer
patent: 4612946 (1986-09-01), Noh et al.
patent: 4772176 (1988-09-01), Montgomery
patent: 5248236 (1993-09-01), Ooshima et al.
patent: 5354168 (1994-10-01), Allison et al.
patent: 5417524 (1995-05-01), Newton
patent: 5921744 (1999-07-01), Toda et al.
patent: 6336775 (2002-01-01), Morita et al.
patent: 6354789 (2002-03-01), Takeuchi et al.
patent: 6630633 (2003-10-01), Uber et al.
patent: 6692196 (2004-02-01), Simm et al.
patent: 6736588 (2004-05-01), Baldwin et al.
patent: 7108474 (2006-09-01), Moriya et al.
patent: 7134222 (2006-11-01), An et al.
patent: 7140827 (2006-11-01), Ikehata et al.
patent: 7165918 (2007-01-01), Kruse
An Geun-Soo
Chang Won-Kie
Yoon Gi-Cheon
Hess Douglas A
MacPherson Kwok Chen & Heid, LLP.
Pellegrini Mark A.
Samsung Electronics Co,. Ltd.
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