Ink jet recording head and method for manufacturing the same

Details Ink jet recording head and method for manufacturing the same Ink jet recording head and method for manufacturing the same

2007-02-13

2007-02-13

McPherson, John A. (Department: 1756)

Radiation imagery chemistry: process, composition, or product th

Imaging affecting physical property of radiation sensitive...

Making named article

Reexamination Certificate

active

10914218

ABSTRACT:
A method for manufacturing an ink jet recording head comprising: (a) a process of forming a positive resist layer (I) made of a photodegradation positive resist (i) on a surface of a substrate having an energy generation element; (b) a process of removing a predetermined area of the positive resist layer (I) by photolithography to form a micro structure which becomes at least an ink flow path; (c) a process of forming a coating resin layer on the surface of the substrate on which the micro structure has been formed; (d) a process of forming ink discharge ports in a portion where the coating resin layer covers the micro structure by photolithography; and (e) a process of removing the micro structure to form the ink flow path communicated with the ink discharge ports, wherein the photodegradation positive resist (i) includes a polymer having a glutarimide structure shown by the following chemical formula (1) in a molecule;wherein R1designates a hydrogen atom or an alkyl group, an allyl group, or an aralkyl group which has the carbon number ranging from 1 to 20.

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