Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Making named article
Reexamination Certificate
1999-06-04
2001-01-23
McPherson, John A. (Department: 1756)
Radiation imagery chemistry: process, composition, or product th
Imaging affecting physical property of radiation sensitive...
Making named article
C347S020000, C347S065000
Reexamination Certificate
active
06177238
ABSTRACT:
BACKGROUND OF THE INVENTION
The present invention is directed to high performance polymers, processes for the preparation thereof, and articles and processes for the use thereof. More specifically, the present invention is directed to high performance polymers suitable for applications such as photoresists, microelectronic devices, ink jet printheads, and the like. One embodiment of the present invention is directed to an ink jet printhead which comprises: (i) an upper substrate, and (ii) a lower substrate in which one surface thereof has an array of heating elements and addressing electrodes formed thereon, said lower substrate having an insulative layer deposited on the surface thereof and over the heating elements and addressing electrodes and patterned to form recesses therethrough to expose the heating elements and terminal ends of the addressing electrodes, said upper and lower substrates being bonded together to form a thermal ink jet printhead having droplet emitting nozzles defined by the upper substrate, the insulative layer on the lower substrate, and the heating elements in the lower substrate, wherein at least one of said upper substrate and said insulative layer comprises a crosslinked or chain extended polymer formed by crosslinking or chain extending a precursor polymer having terminal end groups and monomer repeat units, said precursor polymer being of the formula
wherein P is a substituent which enables crosslinking of the polymer, a, b, c, and d are each integers of 0, 1, 2, 3, or 4, provided that at least one of a, b, c, and d is equal to or greater than 1 in at least some of the monomer repeat units of the polymer, A is
or a mixture of
wherein R is a hydrogen atom, an alkyl group, an aryl group, or mixtures thereof, B is
wherein v is an integer of from 1 to about 20,
wherein z is an integer of from 2 to about 20,
wherein u is an integer of from 1 to about 20,
wherein w is an integer of from 1 to about 20,
wherein R
1
and R
2
each, independently of the other, are hydrogen atoms, alkyl groups, or aryl groups, and p is an integer of 0 or 1,
wherein p is an integer of 0 or 1,
—(CH
2
O)
t
—
wherein t is an integer of from 1 to about 20,
wherein (1) Z is
wherein p is 0 or 1; (2) Ar is
(3) G is an alkyl group selected from alkyl or isoalkyl groups containing from about 2 to about 10 carbon atoms; (4) Ar′ is
wherein s is 0, 1, or 2,
and (6) q is 0 or 1; or mixtures thereof, hydroxy-substituted, hydroxyalkyl-substituted, or hydroxyaryl-substituted derivatives thereof, or mixtures thereof, and n is an integer representing the number of repeating monomer units, said crosslinking or chain extension occurring through crosslinking substituents contained on at least some of the monomer repeat units of the precursor polymer.
Another embodiment of the present invention is directed to a process for forming an ink jet printhead which comprises: (a) providing a lower substrate in which one surface thereof has an array of heating elements and addressing electrodes having terminal ends formed thereon; (b) depositing onto the surface of the lower substrate having the heating elements and addressing electrodes thereon a layer comprising a photopatternable polymer; (c) exposing the layer to actinic radiation in an imagewise pattern such that the photopatternable polymer in exposed areas becomes crosslinked or chain extended and the photopatternable polymer in unexposed areas does not become crosslinked or chain extended, wherein the unexposed areas correspond to areas of the lower substrate having thereon the heating elements and the terminal ends of the addressing electrodes; (d) removing the photopatternable polymer from the unexposed areas, thereby forming recesses in the layer, said recesses exposing the heating elements and the terminal ends of the addressing electrodes; (e) providing an upper substrate comprising a supporting substrate and, coated thereon, a material formed by crosslinking or chain extending a composition comprising a crosslinked or chain extended polymer formed by crosslinking or chain extending a precursor polymer having terminal end groups and monomer repeat units, said precursor polymer being of the formula
wherein P is a substituent which enables crosslinking of the polymer, a, b, c, and d are each integers of 0, 1, 2, 3, or 4, provided that at least one of a, b, c, and d is equal to or greater than 1 in at least some of the monomer repeat units of the polymer, A is
or a mixture of
wherein R is a hydrogen atom, an alkyl group, an aryl group, or mixtures thereof, B is
wherein v is an integer of from 1 to about 20,
wherein z is an integer of from 2 to about 20,
wherein u is an integer of from 1 to about 20,
wherein w is an integer of from 1 to about 20,
wherein R
1
and R
2
each, independently of the other, are hydrogen atoms, alkyl groups, or aryl groups, and p is an integer of 0 or 1,
wherein p is an integer of 0 or 1,
—(CH
2
O)
t
—
wherein t is an integer of from 1 to about 20,
wherein (1) Z is
wherein p is 0 or 1; (2) Ar is
(3) G is an alkyl group selected from alkyl or isoalkyl groups containing from about 2 to about 10 carbon atoms; (4) Ar′ is
wherein s is 0, 1, or 2,
and (6) q is 0 or 1; or mixtures thereof, hydroxy-substituted, hydroxyalkyl-substituted, or hydroxyaryl-substituted derivatives thereof, or mixtures thereof, and n is an integer representing the number of repeating monomer units, and (f) bonding the upper substrate to the lower substrate to form a thermal ink jet printhead having droplet emitting nozzles defined by the upper substrate, the photopatternable polymer on the lower substrate, and the heating elements in the lower substrate.
Yet another embodiment of the present invention is directed to a process for forming an ink jet printhead which comprises: (a) depositing a layer comprising a precursor polymer having terminal end groups and monomer repeat units, said precursor polymer being of the formula
wherein P is a substituent which enables crosslinking of the polymer, a, b, c, and d are each integers of 0, 1, 2, 3, or 4, provided that at least one of a, b, c, and d is equal to or greater than 1 in at least some of the monomer repeat units of the polymer, A is
or a mixture of
wherein R is a hydrogen atom, an alkyl group, an aryl group, or mixtures thereof, B is
wherein v is an integer of from 1 to about 20,
wherein z is an integer of from 2 to about 20,
wherein u is an integer of from 1 to about 20,
wherein w is an integer of from 1 to about 20,
wherein R
1
and R
2
each, independently of the other, are hydrogen atoms, alkyl groups, or aryl groups, and p is an integer of 0 or 1,
wherein p is an integer of 0 or 1,
—(CH
2
O)
t
—
wherein t is an integer of from 1 to about 20,
wherein (1) Z is
wherein p is o or 1; (2) Ar is
(3) G is an alkyl group selected from alkyl or isoalkyl groups containing from about 2 to about 10 carbon atoms; (4) Ar′ is
wherein s is 0, 1, or 2,
and (6) q is 0 or 1; or mixtures thereof, hydroxy-substituted, hydroxyalkyl-substituted, or hydroxyaryl-substituted derivatives thereof, or mixtures thereof, and n is an integer representing the number of repeating monomer units onto a lower substrate in which one surface thereof has an array of heating elements and addressing electrodes having terminal ends formed thereon, said polymer being deposited onto the surface having the heating elements and addressing electrodes thereon; (b) exposing the layer to actinic radiation in an imagewise pattern such that the precursor polymer in exposed areas becomes crosslinked or chain extended and the precursor polymer in unexposed areas does not become crosslinked or chain extended, wherein the unexposed areas correspond to areas of the lower substrate having thereon the heating elements and the terminal ends of the addressing electrodes; (c) removing the precursor polymer from the unexposed areas, thereby forming recesses in the layer, said recesses exposing the heating elements and the terminal ends of the addressing electrodes; (d) providing an upper substrate; an
Fuller Timothy J.
Limburg William W.
Narang Ram S.
Pai Damodar M.
Renfer Dale S.
Byorick Judith L.
McPherson John A.
Xerox Corporation
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