Adhesive bonding and miscellaneous chemical manufacture – Delaminating processes adapted for specified product – Delaminating in preparation for post processing recycling step
Patent
1977-11-09
1978-08-15
Klein, David
Adhesive bonding and miscellaneous chemical manufacture
Delaminating processes adapted for specified product
Delaminating in preparation for post processing recycling step
156647, 156653, 156657, 156661, 346140R, G01D 1518, H01L 21306
Patent
active
041069765
ABSTRACT:
A nozzle array structure for pressurized fluid jets includes a uniform deposited membrane having an array of uniform small orifices therein overlaying a planar substrate having an array of larger aperture openings therethrough with approximately the same central axes as the orifice array. The method of making includes forming a substrate of a planar single crystal material oriented with the (100) planes parallel to the surface. A membrane comprising a uniform coating of an inorganic material is applied to the planar surface of the substrate. The substrate is preferentially etched from the rear surface to form an array of openings therein extending therethrough to the membrane. The membrane is then selectively eroded to form an array of uniform small orifices therein.
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patent: 3801390 (1974-04-01), Lepselter et al.
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patent: 4014029 (1977-03-01), Lane et al.
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patent: 4059480 (1977-11-01), Ruh et al.
Lane, "Fabricating an Ink Jet Nozzle," IBM Technical Disclosure Bulletin, vol. 16, No. 10 (Mar.) 1974, p. 3413.
Chiou Charles
Galli Guido
Loeffler Karl H.
Lorenz Max R.
International Business Machines - Corporation
Klein David
Massie Jerome W.
Schmid, Jr. Otto
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