Information processing apparatus provided with surface aligning

Dynamic information storage or retrieval – Specific detail of information handling portion of system – Electrical modification or sensing of storage medium

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Details

250548, 250307, 250310, G11B 900, G01N 2186

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active

054187710

ABSTRACT:
An information processing apparatus includes first, second and third upper electrodes provided on a first substrate, and first, second and third lower electrodes provided on a second substrate opposed to the first, second and third upper electrodes, respectively. Also provided are first, second and third detectors for detecting a first capacitance between the first upper and lower electrodes, a second capacitance between the second upper and lower electrodes and a third capacitance between the third upper and lower electrodes. In addition, the apparatus also includes a first driver for moving the first and second substrates relative to each other in a first direction with respect to the substrate surfaces, a second driver for moving the first and second substrates relative to each other in a second direction perpendicular to the first direction, a third driver for rotating the first and second substrates relative to each other about an axis in a third direction perpendicular to the first and second directions, and a control unit.

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Proceedings of the IEEE, "Silicon as a Mechanical Material", by Kurt E. Petersen, pp. 420-457, May 1982.

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