Information processing aparatus effecting probe position control

Details Information processing aparatus effecting probe position control Information processing aparatus effecting probe position control

1996-01-16

1998-08-11

Nguyen, Kiet T.

Radiant energy

Inspection of solids or liquids by charged particles

H01J 3728

Patent

active

057930406

ABSTRACT:
An information processing apparatus utilizing a scanning tunnel microscope includes a probe, a detector for detecting the distance between the probe and an object opposed thereto, based on a physical interaction working between the probe and the object, an electrostatic actuator for displacing the probe, for adjusting the distance between the probe and the object. The electrostatic actuator includes mutually opposed two electrodes: A controller is provided for controlling the amount of charge to be accumulated between the electrodes, so as to maintain a desired distance between the probe and the object, based on the result of detection by the detector.

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