Radiant energy – Inspection of solids or liquids by charged particles
Reexamination Certificate
2006-05-30
2006-05-30
Wells, Nikita (Department: 2881)
Radiant energy
Inspection of solids or liquids by charged particles
C250S310000, C250S370070, C250S505100, C257S429000
Reexamination Certificate
active
07053370
ABSTRACT:
The invention provides a cross section evaluating apparatus capable of analyzing the cross sectional structure in a state where the temperature of the specimen is regulated. There is disclosed an information acquisition apparatus comprising a stage for placing the specimen, temperature regulation means for regulating the temperature of the specimen, exposure means for exposing a surface, of which information is desired, of the specimen, and information acquisition means for acquiring information relating to the surface exposed by the exposure means.
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Motoi Taiko
Ueno Rie
Canon Kabushiki Kaisha
Fitzpatrick ,Cella, Harper & Scinto
Hashmi. Zia R.
Wells Nikita
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