Inertial sensor and fabrication method of inertial sensor

Details Inertial sensor and fabrication method of inertial sensor Inertial sensor and fabrication method of inertial sensor

2007-06-12

2009-08-25

Kwok, Helen C. (Department: 2856)

Measuring and testing

Speed, velocity, or acceleration

Angular rate using gyroscopic or coriolis effect

C073S504150, C073S514320

Reexamination Certificate

active

07578186

ABSTRACT:
An inertial sensor and a fabrication method of an inertial sensor are provided. An inertial sensor includes: an elastic support whose one end is supported by a support part disposed on a substrate; an oscillator which is supported by the other end of the elastic support as it is separated from the substrate; and a displacement detecting part which detects a displacement of the oscillator to output a signal, wherein the oscillator is formed with one or both of a groove and a through hole in a direction in parallel with a drive direction of the oscillator.

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