Inertial sensor

Measuring and testing – Speed – velocity – or acceleration – Acceleration determination utilizing inertial element

Reexamination Certificate

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Reexamination Certificate

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11598540

ABSTRACT:
In an inertial sensor, a mass is supported by a number of mass support structures positioned within an inner periphery of the mass. The mass support structures are affixed to a substrate by at least one anchor positioned proximate to the mass' center of mass. A number of sensing fingers are affixed to the mass support structures.

REFERENCES:
patent: 6291875 (2001-09-01), Clark
patent: 6370954 (2002-04-01), Zerbini et al.

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