Inertial positioner and an optical instrument for precise...

Details Inertial positioner and an optical instrument for precise... Inertial positioner and an optical instrument for precise...

2008-11-04

2011-11-22

Vanore, David A (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Analyte supports

C250S440110, C850S001000, C850S002000, C850S003000, C850S052000, C850S053000

Reexamination Certificate

active

08063383

ABSTRACT:
We disclose a precision positioner based on an inertial actuator, an optical instrument for accurate positional readout and control, and an electrostatically clamped assembly for holding any instrument or device. All aspects of the present invention present a significant improvement over the prior art: a positioner is robust and compact; an optical instrument for positional control is a profoundly simple and compact module; a clamping assembly is self-aligning and suitable for robotic hot-swapping of objects being positioned.

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