Inductor and method of forming the same

Details Inductor and method of forming the same Inductor and method of forming the same

2007-06-26

2007-06-26

Nguyen, Tuyen T. (Department: 2832)

Inductor devices

Coil or coil turn supports or spacers

Printed circuit-type coil

Reexamination Certificate

active

11322753

ABSTRACT:
An inductor pattern is formed on a substrate. A conductive pattern having a concave-convex structure is formed on the inductor pattern to increase a surface area of the inductor pattern. An insulation layer is formed on the inductor pattern. After a groove is formed such that the insulation layer is removed to expose the inductor pattern, a conductive pattern is conformally formed on the groove and the insulation layer. Thus, a surface area of the inductor pattern as well as a thickness of an inductor increases to obtain an inductor of a high quality factor.

REFERENCES:
patent: 6903644 (2005-06-01), Wang et al.
patent: 2002/0064923 (2002-05-01), Yamauchi et al.
patent: 2002/0153258 (2002-10-01), Filas et al.
patent: 2004/0110355 (2004-06-01), Hsieh
patent: 2005/0024176 (2005-02-01), Wang et al.
patent: 2005/0116317 (2005-06-01), Lee et al.
patent: 10-0198804 (1999-03-01), None
patent: 10-2002-0039016 (2002-05-01), None

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