Induction heated vapor source

Details Induction heated vapor source Induction heated vapor source

1974-05-22

1976-01-27

Reynolds, Bruce A.

Electric heating

Metal heating

Of cylinders

13 27, 219 1079, H05B 518

Patent

active

039354121

ABSTRACT:
Induction heated vapor source particularly suitable for vacuum deposition of thin films utililzing a flat wound work coil fabricated of a solid conductor enclosed in a hermetically sealed chamber. A cooling medium is circulated through the chamber about the coil, and the coolant is passed to and from the chamber through fittings which also serve to carry electric power to the coil. A crucible for holding the material to be vaporized is mounted on an adjustable pedestal outside the sealed chamber in the field produced by the coil.

REFERENCES:
patent: 1748706 (1930-02-01), Esmarch
patent: 1852214 (1932-04-01), Northrup
patent: 1995811 (1935-03-01), Long
patent: 2848566 (1958-08-01), Limpel
patent: 3551115 (1970-12-01), Jamieson et al.
patent: 3703601 (1972-11-01), Babel
patent: 3739067 (1973-06-01), Stahr

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