Induced crystallographic modification of aromatic compounds

Details Induced crystallographic modification of aromatic compounds Induced crystallographic modification of aromatic compounds

1981-07-29

1984-04-17

Smith, John D.

Radiation imagery chemistry: process, composition, or product th

Imaging affecting physical property of radiation sensitive...

Radiation sensitive composition or product or process of making

357 8, 430272, 430296, H01L 2928

Patent

active

044435320

ABSTRACT:
Materials that change crystal structure upon radiation with a beam of electrons have been found. These materials, such as perylene dianhydride, naphthalene dianhydride, and perylene tetracarboxylic diimide based compounds undergo a transformation from one crystalline structure to another upon exposure to energetic electrons. This transformation causes a change in optical, electrical, and solubility properties. In this manner, these materials are useful as resists for delineating patterns, as optical storage media, and/or in processes for producing patterns of conductive materials such as employed in semiconductor technology.

REFERENCES:
patent: 3403387 (1968-09-01), Boblett
patent: 3871882 (1975-03-01), Wiedemann
patent: 3904407 (1975-09-01), Reginsburger
patent: 4312935 (1982-01-01), Engler
patent: 4312936 (1982-01-01), Engler

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