Indexing of laser beam for programming VLSI devices

Details Indexing of laser beam for programming VLSI devices Indexing of laser beam for programming VLSI devices

1984-06-15

1986-11-18

Roy, Upendra

Metal treatment

Barrier layer stock material, p-n type

With non-semiconductive coating thereon

29574, 148 15, 148DIG93, 156644, 156657, 356356, G01B 902, G01B 1102

Patent

active

046234039

ABSTRACT:
A target for a laser beam consists of a plurality of closely spaced lines that causes the generation of an readily-identifiable read-out so that the laser beam can be indexed when performing laser scribing for redundant memory devices or the like.

REFERENCES:
patent: 4200395 (1980-04-01), Smith et al.
patent: 4211489 (1980-07-01), Klenknecht et al.
patent: 4265542 (1981-05-01), Snow
patent: 4332473 (1982-06-01), Ono
patent: 4377028 (1983-03-01), Imahashi
patent: 4408884 (1983-10-01), Kleinknecht et al.
patent: 4459026 (1984-07-01), Pekelsky
patent: 4928094 (1975-12-01), Angell

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