Independent, self-contained, risk isolated, sectional CIM...

Data processing: generic control systems or specific application – Specific application – apparatus or process – Product assembly or manufacturing

Reexamination Certificate

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Details

C700S121000, C700S099000, C700S113000

Reexamination Certificate

active

07613535

ABSTRACT:
A semiconductor manufacturing system includes a centralized computer integrated manufacturing (CIM) system; a plurality of sectional CIM systems respectively associated with a plurality of manufacturing facilities and coupled with the centralized CIM system; and a centralized basic record module, coupled and coordinated with the centralized CIM system, and designed for defining a unified process flow associated to a mobile object.

REFERENCES:
patent: 6684121 (2004-01-01), Lu et al.
patent: 2002/0165629 (2002-11-01), Ho et al.
patent: 2005/0240298 (2005-10-01), Ni et al.
patent: 2006/0079978 (2006-04-01), Chi et al.
patent: 2007/0061034 (2007-03-01), Puri et al.

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