Material or article handling – Apparatus for moving intersupporting articles into – within,... – Stack forming apparatus
Patent
1996-04-17
1998-09-22
Underwood, Donald W.
Material or article handling
Apparatus for moving intersupporting articles into, within,...
Stack forming apparatus
4147444, B65G 4900
Patent
active
058105492
ABSTRACT:
An independent dual-blade robot assembly is provided for use in semiconductor wafer processing. The robot assembly includes a rotatable stage located within a chamber, a linear track mounted on an upper surface of the rotatable stage, and article first and second motorized platens slidably mounted on the linear track and configured for movement along a longitudinal axis of the linear track. Each motorized platen is magnetically driven and carries an end effector which extends from a leading edge. The end effectors of the first and second motorized platens are preferably horizontally co-planar. The linear track may be a single track carrying both motorized platens, or two linear track sections may be provided where each carries a single motorized platen. The two track sections may be pivotally or rotatably connected to the rotatable stage.
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Applied Materials Inc.
Underwood Donald W.
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