Radiant energy – Irradiation of objects or material
Reexamination Certificate
2006-11-21
2009-06-30
Vanore, David A. (Department: 2881)
Radiant energy
Irradiation of objects or material
C250S455110, C250S50400H, C118S050000, C118S050100, C118S620000, C118S7230AN, C427S532000, C427S553000, C427S557000, C427S558000
Reexamination Certificate
active
07554103
ABSTRACT:
A pump liner is used to direct a laminar flow of purge gas across a workpiece to remove contaminants or species outgassed or otherwise produced by the workpiece during processing. The pump liner can take the form of a ring having a plurality of injection ports, such as slits of a variety of shapes and/or sizes, opposite a plurality of receiving ports in order to provide the laminar flow. The flow of purge gas is sufficient to carry a contaminant or outgassed species from the processing chamber in order to prevent the collection of the contaminants on components of the chamber. The pump liner can be heated, via conduction and irradiation from a radiation source, for example, in order to prevent the condensation of species on the liner. The pump liner also can be anodized or otherwise processed in order to increase the emissivity of the liner.
REFERENCES:
patent: 5405444 (1995-04-01), Moslehi
patent: 6189482 (2001-02-01), Zhao et al.
patent: 6215106 (2001-04-01), Boas et al.
patent: 6280790 (2001-08-01), White et al.
patent: 6364954 (2002-04-01), Umotoy et al.
patent: 6423947 (2002-07-01), Womack et al.
patent: 6566278 (2003-05-01), Harvey et al.
patent: 6614181 (2003-09-01), Harvey et al.
patent: 6803546 (2004-10-01), Boas et al.
patent: 2005/0150452 (2005-07-01), Sen et al.
patent: 2006/0043318 (2006-03-01), Kodera
patent: 2006/0251827 (2006-11-01), Nowak et al.
patent: 2007/0224833 (2007-09-01), Morisada et al.
patent: 2007/0295012 (2007-12-01), Ho et al.
patent: 2007/0298167 (2007-12-01), Ho et al.
Baluja Sanjeev
Kaszuba Andrzej
Mukuti Ndanka O.
Nowak Thomas
Rocha-Alvarez Juan Carlos
Applied Materials Inc.
Maskell Michael
Townsend and Townsend and Crew
Vanore David A.
LandOfFree
Increased tool utilization/reduction in MWBC for UV curing... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Increased tool utilization/reduction in MWBC for UV curing..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Increased tool utilization/reduction in MWBC for UV curing... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-4122055