Incorporation of a phase map into fast model-based optical...

Details Incorporation of a phase map into fast model-based optical... Incorporation of a phase map into fast model-based optical...

2008-03-11

2008-03-11

Shah, Kamini (Department: 2128)

Data processing: structural design, modeling, simulation, and em

Modeling by mathematical expression

C703S013000, C716S030000, C716S030000, C716S030000, C716S030000, C700S108000, C382S145000, C355S067000

Reexamination Certificate

active

10694465

ABSTRACT:
A first method to compute a phase map within an optical proximity correction simulation kernel utilizes simulated wavefront information from randomly generated data. A second method uses measured data from optical tools. A phase map is created by analytically embedding a randomly generated two-dimensional array of complex numbers of wavefront information, and performing an inverse Fourier Transform on the resultant array. A filtering function requires the amplitude of each element of the array to be multiplied by a Gaussian function. A power law is then applied to the array. The elements of the array are shuffled, and converted from the phasor form to real/imaginary form. A two-dimensional Fast Fourier Transform is applied. The array is then unshuffled, and converted back to phasor form.

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