In-situ randomization and recording of wafer processing...

Details In-situ randomization and recording of wafer processing... In-situ randomization and recording of wafer processing...

2005-12-13

2005-12-13

Tran, Khoi H. (Department: 3651)

Data processing: generic control systems or specific application

Specific application, apparatus or process

Article handling

C700S213000, C414S937000

Reexamination Certificate

active

06975920

ABSTRACT:
Wafer order is randomized in-situ by use of a separate wafer staging area and randomly shuffling wafers to and from this staging area to shuffle the processing order of the wafer lot. Positional data is captured for each wafer at both the send and receive ends of the process.

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