Fluid handling – With indicator – register – recorder – alarm or inspection means
Reexamination Certificate
2011-07-12
2011-07-12
Hepperle, Stephen M (Department: 3753)
Fluid handling
With indicator, register, recorder, alarm or inspection means
C137S486000, C137S487500
Reexamination Certificate
active
07975718
ABSTRACT:
The present invention generally provides methods and apparatus for monitoring performance of an injection valve. In one embodiment, a control signal relates to an actuator movement is monitored and correlated to performance of the injection valve.
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Ngo Khai
Nguyen Son
Ulloa Ernesto
Applied Materials Inc.
Hepperle Stephen M
McCalister William
Patterson & Sheridan L.L.P.
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