In situ module for particle removal from solid-state surfaces

Details In situ module for particle removal from solid-state surfaces In situ module for particle removal from solid-state surfaces

2005-09-27

2005-09-27

Hassanzadet, P. (Department: 1763)

Cleaning and liquid contact with solids

Processes

Including application of electrical radiant or wave energy...

C216S094000, C216S065000, C156S345500, C156S345390, C156S345240, C156S345100, C219S121780, C219S121680, C219S121790, C219S121140

Reexamination Certificate

active

06949147

ABSTRACT:
Apparatus and a method for removing particles from the surface of a substrate include determining respective position coordinates of the particles on the surface. A beam of electromagnetic energy is directed via an optical cleaning arm at the coordinates of each of the particles in turn, such that absorption of the electromagnetic energy at the surface causes the particles to be dislodged from the surface substantially without damage to the surface itself.

REFERENCES:
patent: 4987286 (1991-01-01), Allen
patent: 5023424 (1991-06-01), Vaught
patent: 5531857 (1996-07-01), Engelsberg et al.
patent: 5634230 (1997-06-01), Maurer
patent: 5669979 (1997-09-01), Elliott et al.
patent: 5814156 (1998-09-01), Elliott et al.
patent: 764478 (1997-03-01), None
Butterbaugh, “Surface Contamination Control Using Integrated Cleaning”, Semiconductor International, Jun. 1998, pp. 1-5.

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