In-situ laser ablation method for forming oxide superconducting

Details In-situ laser ablation method for forming oxide superconducting In-situ laser ablation method for forming oxide superconducting

1993-05-07

1994-11-01

King, Roy V.

Superconductor technology: apparatus, material, process

Processes of producing or treating high temperature...

Coating

505732, 505730, 427596, 427 62, 4271263, 427314, B05D 306, B05D 512

Patent

active

053607856

ABSTRACT:
In a method of preparing an oxide superconducting thin film having a composition of Y-Ba-Cu-O, for example, using laser ablation, which comprises the steps of applying a laser beam to a target containing components of an oxide superconductive material and depositing particles, being thereby scattered from the target, on a substrate, the oxygen gas flow rate during film deposition is set to be at least 50 SCCM, the oxygen gas pressure during film deposition is set to be 10 to 1000 mTorr, the distance between a target 9 and a substrate 10 is set to be 40 to 100 mm, the temperature of the substrate 10 is set to be 600.degree. to 800.degree. C., the energy density of a laser beam 7 on the surface of the target 9 is set to be at least 1 J/cm.sup.2, and the laser pulse energy is set to be at least 10 mJ.

REFERENCES:
Lynds et al, "Superconducting Thin Films of Y-Ba-Cu-O Produced by Neodymium: Yttrium Aluminum Garnet Laser Ablation", Appl. Phys. lett. 52(4) Jan. 1988 pp. 320-322.
Wu et al;, "Effect of Deposition Rate on Properties of YBa.sub.2 Cu.sub.3 O.sub.7-8 Superconducting Thin Films," Appl. Phys. lett. 56(15) Apr. 9, 1990 pp. 1481-1483.
Singh et al, "Insitu Processing of Epitiaxial Y-Ba-Cu-O High Tc Superconducting Films on (100) SrTiO.sub.3 and (100) YS-ZrO.sub.2 Substrates at 500.degree.-650.degree. C.," Appl. Phys. Lett. 54(2) May 1989 pp. 2271-2273.
Balooch et al, "Y-Ba-Cu-O Superconducting Films Produced by Long-Pulse Laser Vaporization," Appl. Phys. Lett. 55(2) Jul. 1989 pp. 197-199.
Koren et al, "Laser Wavelength Dependent Properties of YBa.sub.2 Cu.sub.3 O.sub.7-8 Thin Films Deposited by Laser Ablation", Appl. Phys. Lett. 55(23) Dec. 1989 pp. 2450-2452.
B. Roas et al, "Epitaxial Growth of YBa.sub.2 Cu.sub.3 O.sub.7-x Thin Films by a Laser Evaporation Process," App. Phys. Lett., 53(16), 1988, pp. 1557-1559.

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