In situ differential imaging and method utilizing a scanning ele

Details In situ differential imaging and method utilizing a scanning ele In situ differential imaging and method utilizing a scanning ele

1988-02-02

1989-07-04

Anderson, Bruce C.

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

250307, 250311, 250397, G01N 2300

Patent

active

048453625

ABSTRACT:
The operating characteristics of an SEM apparatus are enhanced by carrying out in situ deflection during electron beam scanning of an object to be examined. Differential signals derived from the in situ deflection are a direct measure of the spatial derivative of any geometric or material variations on the surface of the scanned object.

REFERENCES:
patent: 4286154 (1981-08-01), Okubo et al.
patent: 4288692 (1981-09-01), Schamber et al.
patent: 4393309 (1983-07-01), Norioka
patent: 4745362 (1988-05-01), Burst

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