In-situ cleaning of light source collector optics

Details In-situ cleaning of light source collector optics In-situ cleaning of light source collector optics

2007-03-27

2007-03-27

El-Arini, Zeinab (Department: 1746)

Cleaning and liquid contact with solids

Processes

Including application of electrical radiant or wave energy...

C134S001000, C134S001200, C134S001300, C134S002000, C134S025400, C134S902000, C134S200000, C134S066000, C134S067000, C134S069000, C134S075000, C134S156000, C134S067000

Reexamination Certificate

active

11217008

ABSTRACT:
A method for cleaning optics in a chamber. The method can include introducing a first etchant into a chamber that encloses an optical component and a source of electromagnetic radiation that is suitable for lithography, ionizing the first etchant, and removing debris from a surface of the optical component.

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