In-plane distribution data compression method, in-plane...

Details In-plane distribution data compression method, in-plane... In-plane distribution data compression method, in-plane...

2007-07-24

2007-07-24

Whitmore, Stacy A (Department: 2825)

Computer-aided design and analysis of circuits and semiconductor

Nanotechnology related integrated circuit design

C700S121000, C382S144000

Reexamination Certificate

active

10891112

ABSTRACT:
After a process is performed on a substrate, the in-plane distribution over the substrate is measured. Measured data of the in-plane distribution which is obtained by the measurement is stored. A model formula of the in-plane distribution is calculated from the stored measured data. The measured data is compared with the model formula. A set of parameters of the model formula is calculated, and the calculated parameters are stored as data of the in-plane distribution over the substrate. The measured data includes measurement coordinates over the substrate. The model formula is obtained by modeling the tendency that the in-plane distribution concentrically varies and the tendency that the in-plane distribution varies along a diameter direction.

REFERENCES:
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patent: 2005/0084987 (2005-04-01), Wilson et al.
patent: 2002-184733 (2002-06-01), None

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